Title :
Infiltration-processed, functionally graded materials for microceramic componenets
Author :
Hassanin, H. ; Jiang, K.
Author_Institution :
Sch. of Mech. Eng., Univ. of Birmingham, Birmingham, UK
Abstract :
A three-dimensional micro ceramic functionally graded material (FGM) has been fabricated by an infiltration process. The proposed technique offers an effective way to tailor the composition and microstructure of ceramic micro components. The process involves soft lithography, colloidal powder processing and the infiltration of yttria stabilized zirconia with a pre-ceramic polymer solution. Analyses by SEM, BSE and EDS have revealed the existence of concentration gradients, the Si and C content decreasing with increasing of the sample depth. The resultant micro part has a homogeneous core encased with a graded and layer of YSZ / SiC.
Keywords :
X-ray chemical analysis; ceramics; colloids; electron backscattering; functionally graded materials; melt infiltration; powders; scanning electron microscopy; silicon compounds; soft lithography; SEM; YO3ZrO3-SiC; colloidal powder processing; concentration gradients; electron backscattering; energy dispersive X-ray spectroscopy; functionally graded materials; infiltration process; microceramic componenets; microstructure; pre-ceramic polymer solution; scanning electron microscopy; soft lithography; yttria stabilized zirconia; Biological materials; Ceramics; Composite materials; Fabrication; Microstructure; Polymers; Scanning electron microscopy; Silicon carbide; Temperature; Thermal stresses;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442488
