Surface microscopy with laserless MEMS based AFM probes

We report here on results of AFM microscopy using laserless MEMS based probes. This new concept of atomic force microscope (AFM) probes using bulk-mode silicon resonators was previously presented [1]. They consist on silicon ring resonators with capacitive transducers and integrated sensing nanotip. We have also demonstrated that these probes are sensitive to nanoscale tip-surface interactions [2], paving the way for AFM imaging. We describe here probes fabrication and their implementation on a Veeco commercial AFM microscope. Force curve measurements are realized in order to set the experimental conditions for AFM operation. For the first time, AFM microscopy images using these laserless MEMS based AFM probes are presented.