Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope

Author

Guo, Z.Y. ; Liu, X.S. ; Yang, Z.C. ; Zhao, Q.C. ; Lin, L.T. ; Xie, H. ; Yan, G.Z.

Author_Institution

Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing, China

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

264

Lastpage

267

Abstract

The electrostatic negative-stiffness behavior of vertical structures under out-of-plane motion decreases the resonant frequency and deteriorates the linearity of a lateral-axis tuning-fork gyroscope (TFG). An electrostatically isolated silicon island is proposed to suppress this behavior. The negative-stiffness behavior is observed and the effectiveness of the electrostatic isolation is experimentally verified. The nonlinearity of the TFG is reduced to 0.34% with a full range of 1,000Â°/s. This is a 5Ã— improvement.

Keywords

gyroscopes; island structure; isolation technology; TFG nonlinearity; electrostatic isolation vertical structure; electrostatic negative-stiffness behavior; electrostatically isolated silicon island; lateral-axis tuning fork gyroscope; linearity improvement; out-of-plane motion; resonant frequency; Electrostatics; Gyroscopes; Linearity; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442514

Filename

5442514