Title :
Electrostatic isolation structure for linearity improvement of a lateral-axis tuning fork gyroscope
Author :
Guo, Z.Y. ; Liu, X.S. ; Yang, Z.C. ; Zhao, Q.C. ; Lin, L.T. ; Xie, H. ; Yan, G.Z.
Author_Institution :
Nat. Key Lab. of Micro/Nano Fabrication Technol., Peking Univ., Beijing, China
Abstract :
The electrostatic negative-stiffness behavior of vertical structures under out-of-plane motion decreases the resonant frequency and deteriorates the linearity of a lateral-axis tuning-fork gyroscope (TFG). An electrostatically isolated silicon island is proposed to suppress this behavior. The negative-stiffness behavior is observed and the effectiveness of the electrostatic isolation is experimentally verified. The nonlinearity of the TFG is reduced to 0.34% with a full range of 1,000°/s. This is a 5× improvement.
Keywords :
gyroscopes; island structure; isolation technology; TFG nonlinearity; electrostatic isolation vertical structure; electrostatic negative-stiffness behavior; electrostatically isolated silicon island; lateral-axis tuning fork gyroscope; linearity improvement; out-of-plane motion; resonant frequency; Electrostatics; Gyroscopes; Linearity; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442514
