Title :
A high sensitivity uniaxial resonant accelerometer
Author :
Comi, Claudia ; Corigliano, Alberto ; Langfelder, Giacomo ; Longoni, Antonio ; Tocchio, Alessandro ; Simoni, Barbara
Author_Institution :
Politec. di Milano, Italy
Abstract :
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is presented. The geometrical setting is analytically optimized in order to improve the sensitivity and the linearity of the sensor. The high level of sensitivity is obtained at relatively low quality factors and keeping the dimensions very small, thanks to an innovative and optimized geometrical design of the device. The proposed accelerometer has been fabricated and the first experimental measurements are presented in the paper.
Keywords :
Q-factor; accelerometers; micromachining; microsensors; device optimized geometrical design; experimental measurements; geometrical setting; micromachined uniaxial silicon resonant accelerometer; quality factors; sensitivity; sensors linearity; Acceleration; Accelerometers; Linearity; Particle beams; Q factor; Resonance; Resonant frequency; Sensor phenomena and characterization; Silicon; Springs;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442517
