DocumentCode
2012448
Title
A high sensitivity uniaxial resonant accelerometer
Author
Comi, Claudia ; Corigliano, Alberto ; Langfelder, Giacomo ; Longoni, Antonio ; Tocchio, Alessandro ; Simoni, Barbara
Author_Institution
Politec. di Milano, Italy
fYear
2010
fDate
24-28 Jan. 2010
Firstpage
260
Lastpage
263
Abstract
A new micro-machined uniaxial silicon resonant accelerometer characterized by a high sensitivity is presented. The geometrical setting is analytically optimized in order to improve the sensitivity and the linearity of the sensor. The high level of sensitivity is obtained at relatively low quality factors and keeping the dimensions very small, thanks to an innovative and optimized geometrical design of the device. The proposed accelerometer has been fabricated and the first experimental measurements are presented in the paper.
Keywords
Q-factor; accelerometers; micromachining; microsensors; device optimized geometrical design; experimental measurements; geometrical setting; micromachined uniaxial silicon resonant accelerometer; quality factors; sensitivity; sensors linearity; Acceleration; Accelerometers; Linearity; Particle beams; Q factor; Resonance; Resonant frequency; Sensor phenomena and characterization; Silicon; Springs;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location
Wanchai, Hong Kong
ISSN
1084-6999
Print_ISBN
978-1-4244-5761-8
Electronic_ISBN
1084-6999
Type
conf
DOI
10.1109/MEMSYS.2010.5442517
Filename
5442517
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