55 Ghz Polysilicon-Emitter Graded Sige-Base Pnp Transistors

Author

Harame, D.L. ; Meyerson, B.S. ; Crabbe, E.F. ; Stanis, C.L. ; Cotte, J.M. ; Stork, J.M.C. ; Megdanis, A.C. ; Patton, G.L. ; Stiffler, S.R. ; Johnson, J.B. ; Warnock, J.D. ; Comfort, J.H. ; Sun, J.Y.-C.

Author_Institution

IBM Research Division, New York

fYear

1991

fDate

28-30 May 1991

Firstpage

Lastpage

Keywords

Annealing; Capacitive sensors; Electric resistance; Fabrication; Furnaces; Implants; Numerical simulation; Silicon carbide; Stability; Sun;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on

Conference_Location

Oiso, Japan

Type

DOI

10.1109/VLSIT.1991.705995

Filename

705995

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