A Piezoelectric Flow Sensor for Wake-Up Switch of Wireless Sensor Network Node

Author

Tomimatsu, Y. ; Kuwana, K. ; Kobayashi, T. ; Itoh, T. ; Maeda, R.

Author_Institution

NMEMS Technol. Res. Organ., Yasu, Japan

fYear

2012

fDate

2-3 April 2012

Firstpage

53

Lastpage

57

Abstract

Power management technology is a fundamental issue in wireless sensor network. In this paper, we propose a concept of a piezoelectric flow sensor for a wake-up switch of a wireless sensor node to reduce the power consumption. The sensor detects air flow change surrounding the wireless sensor node by using a cantilever with Pb(Zr, Ti)O₃ (PZT) thin film. We fabricated a prototype of the flow sensor and measured the relationship between the flow velocity change and the piezoelectric voltage of the cantilever. The sensor responded when the flow velocity changed. The output voltage increases with the increase of the flow velocity change.

Keywords

cantilevers; flow sensors; microswitches; piezoelectric thin films; power consumption; wireless LAN; wireless sensor networks; PZT thin film; air flow change detection; cantilever; flow velocity change measurement; piezoelectric flow sensor; piezoelectric voltage; power management technology; wake up switch; wireless sensor network node; Electrodes; Micromechanical devices; Silicon; Switches; Voltage measurement; Wireless communication; Wireless sensor networks; Reduction of power consumption; Sensor node; Switch; Wireless sensor network; piezoelectric;

fLanguage

English

Publisher

ieee

Conference_Titel

Design, Control and Software Implementation for Distributed MEMS (dMEMS), 2012 Second Workshop on

Conference_Location

Besancon

Print_ISBN

978-1-4673-1203-5

Type

conf

DOI

10.1109/dMEMS.2012.10

Filename

6195434