A MEMS tunable metamaterial filter

Author

Zhu, W.M. ; Cai, H. ; Mei, T. ; Bourouina, T. ; Tao, J.F. ; Lo, G.Q. ; Kwong, D.L. ; Liu, A.Q.

Author_Institution

Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore, Singapore

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

196

Lastpage

199

Abstract

This paper presents a terahertz tunable metamaterial filter using microelectromechanical systems (MEMS) structures. The metamaterial unit cells are tuned by micromachined comb-drive. The metamaterial slab works as a notch filter of THz region, which can lower the transmission of interest frequency down to -70 dB. In the experiment, it measures the tuning range of filter frequency from 3.32 to 3.80 THz. The tunable metamaterial filter has better tunability compared with traditional active metamaterial because the optical property of metamaterial is more sensitive to the change of the unit cell structure.

Keywords

metamaterials; micromechanical devices; notch filters; submillimetre wave filters; MEMS tunable metamaterial filter; frequency 3.32 THz to 3.80 THz; metamaterial slab; microelectromechanical systems; micromachined comb-drive; notch filter; submillimetre wave filters; Magnetic materials; Metamaterials; Micromechanical devices; Optical filters; Optical refraction; Optical sensors; Resonance; Resonator filters; Silicon; Submillimeter wave filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442533

Filename

5442533