DocumentCode

2012798

Title

A Poly-Buffered Face Technology for High Density Flash Memories

Author

Woo, B.J. ; Ong, T.C. ; Lai, S.

Author_Institution

Intel Corporation, CA

fYear

1991

fDate

28-30 May 1991

Firstpage

73

Lastpage

74

Keywords

Beak; Channel hot electron injection; EPROM; Grain size; Implants; Nonvolatile memory; Oxidation; Scalability; Threshold voltage; Tunneling;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on

Conference_Location

Oiso, Japan

Type

conf

DOI

10.1109/VLSIT.1991.705996

Filename

705996