Electro-thermally tunable silicon photonic crystal lens

Author

Cui, Yonghao ; Liu, Ke ; Foland, Steven ; Choi, Kyung-Hak ; Tinker, Mark ; MacFarlane, Duncan ; Lee, Jeong-Bong

Author_Institution

Univ. of Texas at Dallas, Dallas, TX, USA

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

188

Lastpage

191

Abstract

We report extremely compact (30 Â¿m Ã— 7 Â¿m) silicon based two-dimensional (2D) thermo-optically tunable photonic crystal lens which operates at around telecommunication wavelength (1.55 Â¿m) with transverse magnetic (TM) like polarized light. A 150 nm thick NiCr micro-heater was placed directly on top of the photonic crystal lens to provide localized heating. The focal length of the photonic crystal lens is modulated through refractive index change caused by thermo-optic effect of silicon. Tuning of the focal length was experimentally demonstrated by applying various current through the heater and the results showed good agreed with the simulation results.

Keywords

chromium alloys; lenses; light polarisation; micro-optics; nickel alloys; optical tuning; photonic crystals; refractive index; silicon; thermo-optical effects; NiCr; Si; electrothermal tuning; focal length; microheater; refractive index; silicon photonic crystal lens; size 150 nm; telecommunication wavelength; thermo-optical tuning; transverse magnetic like polarized light; wavelength 1.55 mum; Heating; Lenses; Optical design; Optical modulation; Optical refraction; Optical tuning; Photonic crystals; Refractive index; Silicon compounds; Thermooptic effects;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442535

Filename

5442535