Title :
Electro-thermally tunable silicon photonic crystal lens
Author :
Cui, Yonghao ; Liu, Ke ; Foland, Steven ; Choi, Kyung-Hak ; Tinker, Mark ; MacFarlane, Duncan ; Lee, Jeong-Bong
Author_Institution :
Univ. of Texas at Dallas, Dallas, TX, USA
Abstract :
We report extremely compact (30 ¿m × 7 ¿m) silicon based two-dimensional (2D) thermo-optically tunable photonic crystal lens which operates at around telecommunication wavelength (1.55 ¿m) with transverse magnetic (TM) like polarized light. A 150 nm thick NiCr micro-heater was placed directly on top of the photonic crystal lens to provide localized heating. The focal length of the photonic crystal lens is modulated through refractive index change caused by thermo-optic effect of silicon. Tuning of the focal length was experimentally demonstrated by applying various current through the heater and the results showed good agreed with the simulation results.
Keywords :
chromium alloys; lenses; light polarisation; micro-optics; nickel alloys; optical tuning; photonic crystals; refractive index; silicon; thermo-optical effects; NiCr; Si; electrothermal tuning; focal length; microheater; refractive index; silicon photonic crystal lens; size 150 nm; telecommunication wavelength; thermo-optical tuning; transverse magnetic like polarized light; wavelength 1.55 mum; Heating; Lenses; Optical design; Optical modulation; Optical refraction; Optical tuning; Photonic crystals; Refractive index; Silicon compounds; Thermooptic effects;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442535
