Title :
Large-amplitude MEMS electret generator with nonlinear spring
Author :
Miki, Daigo ; Honzumi, Makoto ; Suzuki, Yuji ; Kasagi, Nobuhide
Author_Institution :
Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan
Abstract :
A MEMS electret generator with nonlinear spring has been developed for energy harvesting applications. By using hybrid high-aspect-ratio parylene springs, a large-amplitude oscillation over 1.0 mmp-p has been obtained in a broad frequency range of 46-73 Hz. By using our mechanical model of the nonlinear spring, we have confirmed that the model can mimic frequency response of the mass-spring system. With the aid of electrostatic levitation mechanisms for keeping the air gap, power output of 1.0 ¿W has been obtained at 63 Hz.
Keywords :
electrets; electrostatics; energy harvesting; micromechanical devices; springs (mechanical); MEMS electret generator; electrostatic levitation mechanism; energy harvesting application; frequency 46 Hz to 73 Hz; frequency 63 Hz; frequency response; hybrid high-aspect-ratio parylene spring; large-amplitude oscillation; mass-spring system; nonlinear spring; power 1.0 muW; Chromium; Electrets; Electrodes; Electrostatics; Etching; Micromechanical devices; Power generation; Resonant frequency; Springs; Substrates;
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
DOI :
10.1109/MEMSYS.2010.5442536
