Large-amplitude MEMS electret generator with nonlinear spring

Author

Miki, Daigo ; Honzumi, Makoto ; Suzuki, Yuji ; Kasagi, Nobuhide

Author_Institution

Dept. of Mech. Eng., Univ. of Tokyo, Tokyo, Japan

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

176

Lastpage

179

Abstract

A MEMS electret generator with nonlinear spring has been developed for energy harvesting applications. By using hybrid high-aspect-ratio parylene springs, a large-amplitude oscillation over 1.0 mm_p-p has been obtained in a broad frequency range of 46-73 Hz. By using our mechanical model of the nonlinear spring, we have confirmed that the model can mimic frequency response of the mass-spring system. With the aid of electrostatic levitation mechanisms for keeping the air gap, power output of 1.0 Â¿W has been obtained at 63 Hz.

Keywords

electrets; electrostatics; energy harvesting; micromechanical devices; springs (mechanical); MEMS electret generator; electrostatic levitation mechanism; energy harvesting application; frequency 46 Hz to 73 Hz; frequency 63 Hz; frequency response; hybrid high-aspect-ratio parylene spring; large-amplitude oscillation; mass-spring system; nonlinear spring; power 1.0 muW; Chromium; Electrets; Electrodes; Electrostatics; Etching; Micromechanical devices; Power generation; Resonant frequency; Springs; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442536

Filename

5442536