Plasma source based on arc discharge with cold hollow cathode

Summary form only given, as follows. In a low-pressure arc discharge a dense low-temperature plasma is effectively generated. This plasma finds an application, both in scientific examinations, and in technological purposes. One of the essential disadvantages restricting technological application of an arc discharge with a cathode spot is the presence of a considerable part of a micro-droplet fraction in a plasma flow. In the report the construction, operating principle and main characteristics of an arc plasma source for producing a homogeneous gas-discharge plasma with microdroplet fraction in big vacuum volumes is given. The plasma source is based on an arc discharge with a cathode spot.