A self-adaptive thermal switch array to stabilize the temperature of MEMS devices

A self-adaptive thermal switch array (TSA) based on actuation by low-melting-point alloy droplets is reported to stabilize the temperature of a heat-generating MEMS device at a predetermined range (i.e., the optimal working temperature of the device) without any control circuit or electrical power consumption. When the temperature is below this range, the TSA stays off and works as a thermal insulator. Therefore, the MEMS device can quickly heat itself up to its optimal working temperature during startup. Once this temperature is reached, TSA is automatically turned on to increase the thermal conductance, working as an effective thermal spreader. As a result, the MEMS device tends to stay at its optimal working temperature without complex thermal management components and the associated parasitic power loss. The TSA is fabricated and characterized to confirm the proposed working mechanism.