Resonant cantilevers with ultra-densely inwallfunctionalized mesoporous-silica sensing-layer for detection of ppt-level TNT

Author

Xu, Pengcheng ; Yu, Haitao ; Gan, Xiaohua ; Liu, Min ; Li, Xinxin

Author_Institution

State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Shanghai, China

fYear

2010

fDate

24-28 Jan. 2010

Firstpage

128

Lastpage

131

Abstract

A novel hexa-fluoro-isopropanol-functionalized mesoporous-silica (HFMS) is constructed and loaded on integrated resonant micro-cantilevers for specific detection of trace-level trinitrotoluene (TNT) vapor. With an ultra-high specific-surface-area, an ultra-dense specific sensing-groups and an optimized pore size, the micro/nano combined cantilever sensors have shown TNT detection-limit of about 10 ppt.

Keywords

cantilevers; chemical sensors; explosives; mesoporous materials; microsensors; HFMS; combined cantilever sensors; hexa-fluoro-isopropanol-functionalized mesoporous-silica; integrated resonant microcantilevers; mesoporous-silica sensing-layer; optimized pore size; ppt-level TNT detection; trace-level trinitrotoluene vapor; ultra-dense specific sensing-groups; ultra-densely inwall- functionalization; Biosensors; Chemicals; Gallium nitride; Information technology; Mesoporous materials; Resonance; Surface morphology; Synchrotron radiation; Temperature sensors; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on

Conference_Location

Wanchai, Hong Kong

ISSN

1084-6999

Print_ISBN

978-1-4244-5761-8

Electronic_ISBN

1084-6999

Type

conf

DOI

10.1109/MEMSYS.2010.5442548

Filename

5442548