DocumentCode :
2013089
Title :
High-power pulse-modulated helium ICP for analytical excitation/ionization source
Author :
Zengqi Yu ; Ravi, Reshma ; Hoshimiya, K. ; Collins, George
Author_Institution :
Dept. of Electr. & Comput. Eng., Colorado State Univ., Fort Collins, CO, USA
fYear :
2003
fDate :
5-5 June 2003
Firstpage :
208
Abstract :
Summary form only given, as follows. An atmospheric helium inductively coupled plasma (He-ICP) has been studied as a new plasma source for elemental analysis because it has sufficient ionization ability even for halogens. In this study, to apply a more higher-power pulse (over 2 kW), a new externally air-cooled ICP torch was designed and manufactured. The design of this torch is based on our vortex flow enhanced He-ICP torch. It has a discharge tube of 14 mm i d and 1 mm thickness, which is surrounded with an air cooling jacket of 18 mm i d and 1 mm thickness. The plasma properties of the high-power pulse-modulated He-ICP were measured using a spectroscopic method. The emission intensity of He atomic lines (447 148 nm) were measured.
Keywords :
plasma sources; plasma torches; He; He inductively coupled plasma; plasma properties; plasma source; torch; vortex flow; Atomic measurements; Cooling; Electron tubes; Helium; Ionization; Manufacturing; Plasma materials processing; Plasma measurements; Plasma sources; Pulse measurements;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
ISSN :
0730-9244
Print_ISBN :
0-7803-7911-X
Type :
conf
DOI :
10.1109/PLASMA.2003.1228691
Filename :
1228691
Link To Document :
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