Title :
Beam energy enhancement studies in a plasma sputter-type negative ion source
Author :
Yarnbot, M.L. ; Ubarro, A.O. ; Ramos, H.J.
Abstract :
Summary form only given, as follows. A one-liter volume plasma sputter-type negative ion source is used for the production of metal ions like Zr/sup -/ and ions like O/sup -/ and H/sup -/ depending on the target material and gas. The energies of these ions have been obtained in the range of a few hundred eV using a retarding potential-type electrostatic energy analyzer. In this work, the range of energies is enhanced to the keV range by proper focusing and acceleration schemes of the self-extracted ions. Ion beam characterization include measurements of beam energy, ion current density, perveance and emittance. The results for cesiated and uncesiated targets are discussed.
Keywords :
ion sources; Cs; H; O; Zr; beam energy; cesiated targets; emittance; ion current density; perveance; plasma sputter-type negative ion source; uncesiated targets; Acceleration; Electrostatic analysis; Inorganic materials; Ion beams; Ion sources; Particle beams; Plasma materials processing; Plasma sources; Production; Zirconium;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1228697