Title :
Development of ECR negative ion sources-effects of argon addition for ECR plasmas
Author :
Fujioka, K. ; Fukumasa, O.
Author_Institution :
Yamaguchi Univ., Japan
Abstract :
Summary form only given, as follows. We have studied high-density plasma production and high efficiency H/sup $/production in ECR discharge plasmas with linecups-type and ring-cups-type magnetic fields, which are different ECR resonance conditions. In this paper, we report the effects of Ar addition on plasma parameters and negative ion production in ECR plasmas.
Keywords :
argon; ion sources; Ar; Ar addition; ECR negative ion sources; ECR plasma; H; H/sup -/ production; negative ion production; plasma parameters; Argon; Cathodes; Ion sources; Magnetic separation; Plasma density; Plasma measurements; Plasma sources; Plasma temperature; Production; Tellurium;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1228698
