Title :
On the UTBB SOI MOSFET performance improvement in quasi-double-gate regime
Author :
Kilchytska, V. ; Flandre, D. ; Andrieu, F.
Author_Institution :
ICTEAM/ELEN, Univ. Catholique de Louvain (UCL), Louvain-la-Neuve, Belgium
Abstract :
This work investigates the simultaneous electrostatic improvement and performance enhancement of UTBB SOI MOSFETs obtained in quasi-double-gate (QDG) regime (i.e. simultaneously biasing gate and substrate (or ground plane) as Vsub=k*Vg) as a strong function of k-multiplication factor, when compared to a standard single-gate mode. QDG mode is demonstrated to allow threshold voltage tuning and on-current enhancement without off-state current degradation, of interest for digital applications (e.g. switches). Improved performance in QDG mode combined with lowered DIBL and enhanced gain are of interest for high-precision low-frequency analog applications. The work finally quantifies the resulting gate area decrease in QDG mode, potentially exploitable in actual circuit implementations.
Keywords :
MOSFET; silicon-on-insulator; substrates; QDG mode; UTBB SOI MOSFET performance improvement; electrostatic improvement; k multiplication factor; low frequency analog application; off state current degradation; on current enhancement; performance enhancement; quasi double gate regime; single gate mode; substrate; threshold voltage tuning; Electrostatics; Logic gates; MOSFET circuits; Performance evaluation; Silicon; Standards; Substrates;
Conference_Titel :
Solid-State Device Research Conference (ESSDERC), 2012 Proceedings of the European
Conference_Location :
Bordeaux
Print_ISBN :
978-1-4673-1707-8
Electronic_ISBN :
1930-8876
DOI :
10.1109/ESSDERC.2012.6343379