DocumentCode :
2013853
Title :
[Copyright notice]
fYear :
2010
fDate :
24-28 Jan. 2010
Firstpage :
1
Lastpage :
1
Abstract :
The following topics are dealt with: MEMS fabrication; nanomaterials; nanodevices; electronics packaging; physical sensors; RF MEMS resonators; optical MEMS; biosensors; chemical sensors; medical sensors; microfluidic components; actuators; power MEMS; energy harvesting.
Keywords :
biomedical equipment; biosensors; chemical sensors; electronics packaging; energy harvesting; microactuators; microfabrication; microfluidics; micromechanical resonators; nanoelectronics; MEMS fabrication; RF MEMS resonators; biosensors; chemical sensors; electronics packaging; energy harvesting; medical sensors; microfluidic components; nanodevices; nanomaterials; optical MEMS; physical sensors; power MEMS;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems (MEMS), 2010 IEEE 23rd International Conference on
Conference_Location :
Wanchai, Hong Kong
ISSN :
1084-6999
Print_ISBN :
978-1-4244-5761-8
Electronic_ISBN :
1084-6999
Type :
conf
DOI :
10.1109/MEMSYS.2010.5442580
Filename :
5442580
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2013853
بازگشت