Title :
Nonlocal electron kinetics in microwaves discharge
Author :
Azarenkov, N.A. ; Gushchin, V.V. ; Gushchin, V.V.
Abstract :
Summary form only given, as follows. The present report is devoted to the theoretical description of a source of the plasma created and sustained by a two-dimensionally nonuniform axial-symmetric surface wave. The considered wave is penetrated on radius also is weakened in an azimuthal direction. Within the framework of kinetic approximation the resonant attenuation of a wave caused by transformation of a surface wave in a point (r) = 0 is taken into account also.
Keywords :
high-frequency discharges; plasma density; plasma kinetic theory; plasma sources; plasma transport processes; ambipolar potential dependence; axial-symmetric surface wave; electron distribution function; elementary processes frequency; generalized nonlocal approach; kinetic approximation; microwave discharge; nonlocal electron kinetics; plasma density; plasma diffusion; plasma source; resonant attenuation; spatial attenuation; spatial gradients; two-dimensional inhomogeneity; two-dimensionally nonuniform surface wave; Electromagnetic refraction; Electrons; Equations; Kinetic theory; Magnetic fields; Magnetic resonance; Plasma density; Plasma sources; Plasma waves; Surface waves;
Conference_Titel :
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location :
Jeju, South Korea
Print_ISBN :
0-7803-7911-X
DOI :
10.1109/PLASMA.2003.1228752
