Title :
Modeling of silicon micromachined heat flux sensor
Author :
Gridchin, Victor A. ; Lobach, Oleg V. ; Dikareva, Regina P. ; Bakaleynik, Elena L.
Author_Institution :
Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Novosibirsk, Russia
fDate :
June 30 2010-July 4 2010
Abstract :
THE HEAT FLUX measurement has the important practical value in construction, climatological researches and medicine . In this paper the finite element model of sensor is presented and its comparison both with simple model and experimental data is made.
Keywords :
finite element analysis; heat measurement; micromechanical devices; temperature sensors; climatological research; finite element model; heat flux measurement; silicon micromachined heat flux sensor; Finite element methods; Heating; Seminars;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-6626-9
DOI :
10.1109/EDM.2010.5568640
