• DocumentCode
    2014462
  • Title

    Modeling of silicon micromachined heat flux sensor

  • Author

    Gridchin, Victor A. ; Lobach, Oleg V. ; Dikareva, Regina P. ; Bakaleynik, Elena L.

  • Author_Institution
    Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Novosibirsk, Russia
  • fYear
    2010
  • fDate
    June 30 2010-July 4 2010
  • Firstpage
    117
  • Lastpage
    120
  • Abstract
    THE HEAT FLUX measurement has the important practical value in construction, climatological researches and medicine . In this paper the finite element model of sensor is presented and its comparison both with simple model and experimental data is made.
  • Keywords
    finite element analysis; heat measurement; micromechanical devices; temperature sensors; climatological research; finite element model; heat flux measurement; silicon micromachined heat flux sensor; Finite element methods; Heating; Seminars;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    978-1-4244-6626-9
  • Type

    conf

  • DOI
    10.1109/EDM.2010.5568640
  • Filename
    5568640
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2014462