Title :
FEM simulation of piezoresistive pressure module
Author :
Gridchin, Victor A. ; Chebanov, Michail A.
Author_Institution :
Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Novosibirsk, Russia
fDate :
June 30 2010-July 4 2010
Abstract :
The impact of singularity points on stress distribution in piezoresistive module is investigated by means of FEM simulation. The strong influence of singularities on stress distribution in silicon-glass interface is presented in this paper.
Keywords :
finite element analysis; piezoresistive devices; silicon; FEM simulation; Si-SiO2; piezoresistive pressure module; silicon-glass interface; stress distribution; Computational modeling; Face; Finite element methods; Glass; Seminars; Silicon; FEM simulation; pressure sensor; singular points;
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-6626-9
DOI :
10.1109/EDM.2010.5568641
