Title :
High-voltage photovoltaic micro-devices fabricated by a new laser-processing
Author :
Sakakibara, Takahisa ; Izu, Hiroaki ; Kura, Tatsuya ; Shinohara, Wataru ; Iwata, Hiroshi ; Kiyama, Seiichi ; Tsuda, Shinya
fDate :
29 Jan-2 Feb 1995
Keywords :
Electrostatics; Integrated circuit interconnections; Lighting; Micromechanical devices; Optical device fabrication; Photovoltaic systems; Power generation; Short circuit currents; Solar power generation; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472533