Title :
A micromachined vibrating gyroscope
Author :
Tanaka, Kiyoshi ; Mochida, Y. ; Sugimoto, Satoshi ; Moriya, K. ; Hasegawa, T. ; Atsuchi, K. ; Ohwada, Kazunari
fDate :
29 Jan-2 Feb 1995
Keywords :
Capacitance; Electrodes; Electrostatics; Gyroscopes; Micromachining; Optical resonators; Q factor; Resonant frequency; Silicon; Testing;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472534
