DocumentCode :
2015055
Title :
Abruptness of axial Si-Ge heterojunctions in nanowires
Author :
Nastovjak, Alla G. ; Neizvestny, Igor G. ; Shwartz, Nataliya L.
Author_Institution :
Inst. of Semicond. Phys., SB RAS, Novosibirsk, Russia
fYear :
2010
fDate :
June 30 2010-July 4 2010
Firstpage :
55
Lastpage :
58
Abstract :
The process of Si-Ge heterostructures formation in nanowhiskers (NWs) grown by the vapor-liquid-solid mechanism was investigated using Monte Carlo simulation. It was demonstrated that it is impossible to grow atomically abrupt axial heterojunctions via classical vapor-liquid-solid mechanism due to gradual change of catalyst drop composition when switching the fluxes. Dependences of GexSi1-x composition in transition region on the ratio of germanium and silicon fluxes and deposition duration were investigated. The width of Si-Ge axial heterojunction was found to be dependent on NW diameter d. In adsorption-induced growth mode the width has linear dependence on d and in diffusion-induced growth mode it is either constant (when growth rate ~1/d) or proportional to 1/d (when growth rate ~1/d2).
Keywords :
Monte Carlo methods; adsorption; elemental semiconductors; germanium; nanofabrication; nanowires; semiconductor growth; semiconductor heterojunctions; semiconductor quantum wires; silicon; whiskers (crystal); Monte Carlo simulation; Si-Ge; abruptness; adsorption-induced growth mode; atomically abrupt axial heterojunctions; axial heterojunction width; catalyst drop composition; deposition duration dependence; flux switching; germanium-silicon flux ratio dependence; growth rate; nanowhisker diameter; nanowires; transition region composition; vapor-liquid-solid growth mechanism; Computational modeling; Cryptography; Lead; Microelectronics; Nanowires; Quantum computing; Silicon; Monte Carlo; Nanowhisker; heterojunction; simulation;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on
Conference_Location :
Novosibirsk
Print_ISBN :
978-1-4244-6626-9
Type :
conf
DOI :
10.1109/EDM.2010.5568666
Filename :
5568666
Link To Document :
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