DocumentCode :
2015108
Title :
Fabrication of giant magnetostrictive thin film actuators
Author :
Quandt, E. ; Seemann, E.
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
273
Keywords :
Actuators; Amorphous magnetic materials; Fabrication; Magnetic anisotropy; Magnetic films; Magnetic materials; Magnetostriction; Perpendicular magnetic anisotropy; Sputtering; Transistors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472535
Filename :
472535
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2015108
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