Shape effect of ferro-electric pellet in packed bed non-thermal plasma reactor for C/sub 2/F/sub 6/ treatments

Summary form only given, as follows. Ferro-electric packed bed non-thermal plasma reactor has been widely investigated for application to PFC removal, NOx removal, VOC treatment, etc. The spherical shapes are generally used as the ferro-electric pellets to produce extremely high electric field near the contact points of the pellets. However, the spherical pellets packed bed reactor causes large pressure drop between the inlet and the outlet of the reactor because of the small cross section of the as flow. This large pressure drop becomes disadvantage for commercialization to the semiconductor industries. Hollow shaped pellets, like a short and thick tube, are suitable for the packed bed reactor because the cross section of the gas flow is larger than that in case of the spherical shaped pellets. We carried out the PFC removal from simulated gas using the packed bed reactor for various pellet shapes.