Novel Electroplating-Based Technology for the Fabrication of Giant Micromirrors for Space and Terrestrial Applications

A novel approach to manufacturing giant micromirrors is proposed. The approach combines selective electroplating and flip-chip based technologies. It allows for large air gaps and permits independent fabrication of the mirrors and control electronics, circumventing temperature and sacrificial layer incompatibilities between them. Design, simulation and process development for the fabrication of electrostatically actuated piston and torsion micromirrors are presented. The simulated structures are designed to allow large deflection, i.e. piston displacement of 10 µm and torsional deflection of 35°. Smooth micromirror surfaces (roughness lower than 5nm rms) and large radius of curvature (R as large as 23 cm) are achieved.