Title :
High aspect ratio microstructures on porous anodic aluminum oxide
Author :
Tan, Songsheng ; Reed, Michael ; Han, Hongtao ; Boudreau, Robert
fDate :
29 Jan-2 Feb 1995
Keywords :
Aluminum oxide; Chemical technology; Chemistry; Etching; Instruments; Laboratories; Metals industry; Microstructure; Substrates; Surface morphology;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472536
