• DocumentCode
    2015347
  • Title

    High aspect ratio microstructures on porous anodic aluminum oxide

  • Author

    Tan, Songsheng ; Reed, Michael ; Han, Hongtao ; Boudreau, Robert

  • fYear
    1995
  • fDate
    29 Jan-2 Feb 1995
  • Firstpage
    267
  • Keywords
    Aluminum oxide; Chemical technology; Chemistry; Etching; Instruments; Laboratories; Metals industry; Microstructure; Substrates; Surface morphology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
  • Print_ISBN
    0-7803-2503-6
  • Type

    conf

  • DOI
    10.1109/MEMSYS.1995.472536
  • Filename
    472536
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2015347