DocumentCode :
2015609
Title :
Piezoelectric lead-zirconate-titanate actuator films for microelectromechanical systems applications
Author :
Mescher, M. ; Abe, Takeshi ; Brunett, Bruce ; Metla, Hasan ; Schlesinger, T.E. ; Reed, Michael
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
261
Keywords :
Gallium arsenide; Laser tuning; Lead compounds; Microelectromechanical systems; Optical films; Piezoelectric actuators; Piezoelectric films; Semiconductor films; Sputtering; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472537
Filename :
472537
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2015609
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