DocumentCode

2015613

Title

Automatic Pattern Generation System for Phase Shifting Mask

Author

Hirai, Y. ; Matsuoka, K. ; Hashimoto, K. ; Nomura, N.

Author_Institution

Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd., Japan

fYear

1991

fDate

28-30 May 1991

Firstpage

95

Lastpage

96

Keywords

Design automation; Fabrication; Flowcharts; Lithography; Manuals; Phased arrays; Random access memory; Resists; Very large scale integration; Wiring;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on

Conference_Location

Oiso, Japan

Type

conf

DOI

10.1109/VLSIT.1991.706007

Filename

706007