DocumentCode
2015614
Title
Nontactile reliability testing of a micro optical attenuator
Author
Rembe, Christian ; Aschemann, Harald ; Wiesche, Stefan Aus der ; Hofer, Eberhard P. ; Debeda, Helen ; Mohr, Juergen ; Wallrabe, Ulrike
Author_Institution
Dept. of Meas., Control & Microtechnol., Ulm Univ., Germany
fYear
2000
fDate
2000
Firstpage
123
Lastpage
128
Abstract
The reliability investigations presented in this paper have been performed on a micro opto electro mechanical switch developed for switching and attenuation of light propagation in optical fibers. It is demonstrated that high-speed cine photomicrography together with model based evaluation of the image sequences is a powerful diagnostic tool for reliability testing of dynamic processes in micro electro mechanical systems (MEMS)
Keywords
micro-optics; microactuators; optical fibres; semiconductor device reliability; MEMS; dynamic processes; high-speed cine photomicrography; light propagation; micro optical attenuator; micro opto electro mechanical switch; nontactile reliability testing; optical fibers; Image sequences; Mechanical systems; Optical attenuators; Optical fibers; Optical propagation; Optical switches; Photomicrography; Power system modeling; Power system reliability; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 2000. Proceedings. 38th Annual 2000 IEEE International
Conference_Location
San Jose, CA
Print_ISBN
0-7803-5860-0
Type
conf
DOI
10.1109/RELPHY.2000.843902
Filename
843902
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