Title :
New Functions Elaborated in Oxide Glasses by Nanotechnology
Author :
Nishii, Junji ; Hirao, Kazuyuki
Author_Institution :
National Institute of Advance Industrial Science and Technology
Abstract :
Recent three topics of Nanotechnology Glass Project were described. (1) A proton-conducting hybrid material was fabricated using a glass plate with nano-pores. The conductivity of the hybrid glass plate was comparable to Nafion, and no corrosion or degradation observed up to 120°C. (2) Nano-particles of CdTe were synthesized in a water solution and embedded in the glass matrix using a sol-gel method. The emission quantum efficiency pf 3% was attained. (3) Deep dry etching followed by overcladding buried the DOE with a deep groove inside a Si0₂ plate, which was used for fabrication of an ultra small demultiplexer.
Keywords :
Glass; Micromechanical devices; Nanotechnology;
Conference_Titel :
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN :
0-7695-2189-4
DOI :
10.1109/ICMENS.2004.1508975