Design, Implementation, and Verification of a CMOS-Integrated Chemical Sensor System

Single-chip chemical microinstruments offer many benefits over bench-top laboratory equipment. This work presents the design, implementation, and verification of a CMOS-integrated microinstrument including voltammetric sensors and electronic interface on a single silicon substrate. Both component and system design parameters are detailed. Mixed-domain models of the system which can be simulated in a standard CAD environment are generated and used for system optimization. The integrated device was implemented by post-processing sensor structures on top of AMIS-fabricated, 0.5 µm CMOS electronics. Fabrication details are discussed and experimental device characteristics including functionality and lifetime testing are presented. The completed device has an active area of 0.6mm² with sensors sites measuring 64 µm². It operates from a 3V supply and consumes 1.6mW