Title :
Flexible microdischarge arrays:large scale fabrication and AC operation
Author :
Park, Sung-Jin ; Chen, Kuo-Feng ; Eden, J. Gary
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
Abstract :
In this paper, fabrication of microdischarge arrays in metal/polymer/metal structures having a total thickness of 30 -100 μm is reported. Microcavities 30-100 μm in diameter are formed by laser microdrilling or a chemical etching process. All of the fabrication procedures have been designed to be compatible with roll-to-roll processing.
Keywords :
drilling; etching; glow discharges; laser beam machining; micro-optics; microcavities; optical arrays; optical fabrication; optical polymers; plasma devices; 30 to 100 mum; chemical etching; laser microdrilling; metal/polymer/metal structures; microcavities; microdischarge arrays; Application software; Biomedical optical imaging; Large-scale systems; Microcavities; Optical arrays; Optical device fabrication; Optical films; Polymers; Substrates; Voltage;
Conference_Titel :
Lasers and Electro-Optics Society, 2004. LEOS 2004. The 17th Annual Meeting of the IEEE
Print_ISBN :
0-7803-8557-8
DOI :
10.1109/LEOS.2004.1363207
