Title :
Development of a microphotocantilever for near-field scanning optical microscopy
Author :
Akamine, Shinya ; Kuwano, Hiroki ; Fukuzawa, Kenji ; Yamada, Hirofumi
fDate :
29 Jan-2 Feb 1995
Keywords :
Apertures; Atom optics; Atomic force microscopy; Glass; Laser beams; Optical films; Optical microscopy; Optical scattering; Optical surface waves; Photodiodes;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472538
