DocumentCode
2015857
Title
Development of a microphotocantilever for near-field scanning optical microscopy
Author
Akamine, Shinya ; Kuwano, Hiroki ; Fukuzawa, Kenji ; Yamada, Hirofumi
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
45
Keywords
Apertures; Atom optics; Atomic force microscopy; Glass; Laser beams; Optical films; Optical microscopy; Optical scattering; Optical surface waves; Photodiodes;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472538
Filename
472538
Link To Document