Title :
Measurements of physical parameters with ultrasound and microdiaphragms
Author :
Schomburg, W.K. ; Vitt, M. ; Bacher, W. ; Borner, M.W. ; Menz, W.
fDate :
29 Jan-2 Feb 1995
Keywords :
Biomembranes; Density measurement; Pulse measurements; Resonance; Resonant frequency; Strain measurement; Temperature sensors; Ultrasonic imaging; Ultrasonic variables measurement; Vibration measurement;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472539