DocumentCode :
2016196
Title :
A computationally practical approach to simulating complex surface-micromachined structures with fabrication non-idealities
Author :
Yie, H. ; Bart, S.F. ; White, J. ; Senturia, S.D.
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
128
Keywords :
Acceleration; Accelerometers; Capacitors; Computational modeling; Electromechanical sensors; Electrostatic analysis; Fabrication; Fingers; Residual stresses; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472541
Filename :
472541
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2016196
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