DocumentCode

2016209

Title

A Three-Dimensional Dynamic Simulation of Borophosphosilicate Glass Flow

Author

Umimoto, H. ; Odanaka, S. ; Imai, S.

Author_Institution

Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd., Japan

fYear

1991

fDate

28-30 May 1991

Firstpage

99

Lastpage

100

Keywords

Analytical models; Capacitors; Glass; Impurities; Planarization; Scanning electron microscopy; Surface tension; Surface topography; Viscosity; Wiring;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on

Conference_Location

Oiso, Japan

Type

conf

DOI

10.1109/VLSIT.1991.706009

Filename

706009