Title :
A Three-Dimensional Dynamic Simulation of Borophosphosilicate Glass Flow
Author :
Umimoto, H. ; Odanaka, S. ; Imai, S.
Author_Institution :
Semiconductor Research Center, Matsushita Electric Industrial Co., Ltd., Japan
Keywords :
Analytical models; Capacitors; Glass; Impurities; Planarization; Scanning electron microscopy; Surface tension; Surface topography; Viscosity; Wiring;
Conference_Titel :
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location :
Oiso, Japan
DOI :
10.1109/VLSIT.1991.706009
