DocumentCode :
2016219
Title :
3D coupled electro-mechanics for MEMS: applications of CoSolve-EM
Author :
Gilbert, J.R. ; Legtenberg, R. ; Senturia, S.D.
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
122
Keywords :
Application software; Capacitive sensors; Computer science; Conducting materials; Conductors; Electrostatics; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Tactile sensors;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472542
Filename :
472542
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2016219
بازگشت