DocumentCode
2016219
Title
3D coupled electro-mechanics for MEMS: applications of CoSolve-EM
Author
Gilbert, J.R. ; Legtenberg, R. ; Senturia, S.D.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
122
Keywords
Application software; Capacitive sensors; Computer science; Conducting materials; Conductors; Electrostatics; Mechanical sensors; Microelectromechanical systems; Micromechanical devices; Tactile sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472542
Filename
472542
Link To Document