Title :
The role of copper in electromigration: the effect of a Cu-vacancy binding energy
Author_Institution :
Dept. of Phys., Rhode Island Univ., Kingston, RI, USA
Abstract :
The effect of a Cu-vacancy binding energy on electromigration transport in Al-Cu alloys is studied in detail. A lattice-gas model for electromigration is developed which accounts for the Cu-vacancy binding energy. Expressions for the diffusion coefficients are derived in the limit of low vacancy concentrations and calculated using Monte Carlo simulations. The diffusion equations are solved for the failure times and concentration profiles. Our results show that for a binding energy of about 0.2 eV there is a dramatic increase in the failure time for copper doping levels of only 1%. The concentration profiles are consistent with `incubation time´ phenomena in experiments where the copper is found to drift away from the blocking boundary before failure occurs
Keywords :
Monte Carlo methods; aluminium alloys; copper alloys; electromigration; integrated circuit interconnections; vacancies (crystal); Al-Cu; Cu-vacancy binding energy; Monte Carlo simulations; blocking boundary; concentration profiles; diffusion coefficients; diffusion equations; electromigration; failure times; incubation time; lattice-gas model; vacancy concentration; Aluminum; Copper; Doping; Electromigration; Equations; Grain boundaries; Lattices; Microelectronics; Microscopy; Physics;
Conference_Titel :
Reliability Physics Symposium, 2000. Proceedings. 38th Annual 2000 IEEE International
Conference_Location :
San Jose, CA
Print_ISBN :
0-7803-5860-0
DOI :
10.1109/RELPHY.2000.843933