Title :
Simultaneous Deposition and Fusion-Flow Planarization of Bpsg
Author :
Hartman, J. ; McKinley, K. ; Helms, A. ; Logan, M. ; Kern, W. ; Inudo, Y.
Author_Institution :
Sumitomo Metals Industries, Ltd., Japan
Keywords :
Annealing; Chemical vapor deposition; Filling; Furnaces; Glass; Inductors; Nitrogen; Planarization; Substrates; Temperature distribution;
Conference_Titel :
VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
Conference_Location :
Oiso, Japan
DOI :
10.1109/VLSIT.1991.706010
