Title :
A π Small-Signal Model of MEMS Series Switches Based on the Parameter- Extraction Method
Author :
Jaewoo Lee ; Woo-Seok Yang ; Changhee Hyoung ; Sungweon Kang ; Chang-Auck Choi
Author_Institution :
Electronics and Telecommunications Research Institute
Abstract :
A novel π small-signal model of MEMS series switches is presented based on a parameter-extraction method, which can determine a fringing capacitance (C_f) in the end of each signal line as well as a contact resistance (R_c). For an on-state modeling, the average error of S₁₁ for the π model is 5.1% in the range of 5~35 GHz, whereas that of the conventional model of two-port series-impedance without C_f is 167.2 %. It is noted that the conventional model is not valid anymore for the on-state model and C_f should be taken into account. The small-signal modeling by the proposed π model demonstrates the validity of the approach.
Keywords :
Capacitance; Coplanar waveguides; Electrodes; Micromechanical devices; Polyimides; Power system modeling; Predictive models; Solid state circuits; Switches; Telecommunication switching;
Conference_Titel :
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Conference_Location :
Banff, AB, Canada
Print_ISBN :
0-7695-2189-4
DOI :
10.1109/ICMENS.2004.1509002
