Title :
Equilibrium and Stability of Micro-Cantilevers Used in Atomic Force Microscopy
Author :
Zu, Jean W. ; Cheng, Gong ; Tang, Qian
Author_Institution :
University of Toronto
Abstract :
The equilibrium states and their stability of micro-cantilevers used in the AFM under the noncontact and contact mode operations are studied with the energy method. The focus of the study is laid on the influence of the length of the micro-cantilever as well as its working distance from the sample surface upon the system’s equilibrium state. The findings from this study can provide useful guidance to the design of micro-cantilevers in the AFM.
Keywords :
Atomic force microscopy; Atomic measurements; Educational institutions; Electron microscopy; Equations; Focusing; Force measurement; Industrial engineering; Potential energy; Stability analysis;
Conference_Titel :
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN :
0-7695-2189-4
DOI :
10.1109/ICMENS.2004.1509007
