• DocumentCode
    2016686
  • Title

    Parametric Identification of Contact Forces Using AFM

  • Author

    Abdel-Rahman, Eihab M. ; Nayfeh, Ali H.

  • Author_Institution
    Virginia Polytechnic Institute and State University
  • fYear
    2004
  • fDate
    25-27 Aug. 2004
  • Firstpage
    541
  • Lastpage
    547
  • Abstract
    We propose a comprehensive approach to characterize the contact stiffness of surfaces using the contact-mode of the Atomic Force Microscope (AFM). Our procedure utilizes the subharmonic resonance of order one-half of the probe-tip-sample system in conjunction with higher-order spectralmeasurements to determine independently the quadratic and cubic contact stiffness coefficients.
  • Keywords
    Atomic force microscopy; Atomic measurements; Damping; Frequency; Probes; Resonance; Structural beams; Surface topography; Ultrasonic variables measurement; Vibrations;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
  • Print_ISBN
    0-7695-2189-4
  • Type

    conf

  • DOI
    10.1109/ICMENS.2004.1509008
  • Filename
    1509008