Title :
Parametric Identification of Contact Forces Using AFM
Author :
Abdel-Rahman, Eihab M. ; Nayfeh, Ali H.
Author_Institution :
Virginia Polytechnic Institute and State University
Abstract :
We propose a comprehensive approach to characterize the contact stiffness of surfaces using the contact-mode of the Atomic Force Microscope (AFM). Our procedure utilizes the subharmonic resonance of order one-half of the probe-tip-sample system in conjunction with higher-order spectralmeasurements to determine independently the quadratic and cubic contact stiffness coefficients.
Keywords :
Atomic force microscopy; Atomic measurements; Damping; Frequency; Probes; Resonance; Structural beams; Surface topography; Ultrasonic variables measurement; Vibrations;
Conference_Titel :
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN :
0-7695-2189-4
DOI :
10.1109/ICMENS.2004.1509008
