DocumentCode
2016686
Title
Parametric Identification of Contact Forces Using AFM
Author
Abdel-Rahman, Eihab M. ; Nayfeh, Ali H.
Author_Institution
Virginia Polytechnic Institute and State University
fYear
2004
fDate
25-27 Aug. 2004
Firstpage
541
Lastpage
547
Abstract
We propose a comprehensive approach to characterize the contact stiffness of surfaces using the contact-mode of the Atomic Force Microscope (AFM). Our procedure utilizes the subharmonic resonance of order one-half of the probe-tip-sample system in conjunction with higher-order spectralmeasurements to determine independently the quadratic and cubic contact stiffness coefficients.
Keywords
Atomic force microscopy; Atomic measurements; Damping; Frequency; Probes; Resonance; Structural beams; Surface topography; Ultrasonic variables measurement; Vibrations;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN
0-7695-2189-4
Type
conf
DOI
10.1109/ICMENS.2004.1509008
Filename
1509008
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