• DocumentCode
    2016712
  • Title

    Theoretical Calculation of TAM and Correction of Topography

  • Author

    Du, Sidan ; Cai, Lian ; Gao, Duntang

  • Author_Institution
    Nanjing University
  • fYear
    2004
  • fDate
    25-27 Aug. 2004
  • Firstpage
    548
  • Lastpage
    552
  • Abstract
    A two-sphere system is applied to simulate the electrostatic force between the tip and the sample of tunneling acoustic microscopy (TAM). And theoretical calculation of this electrostatic force is presented. The cause of the distortion of topography obtained by feed back system is analyzed, and a method to correct this distortion is given. With this method, the correction results of two-dimensional and three-dimensional topography are shown, which are valuable and important to the research of metallic tip surface system.
  • Keywords
    Acoustic distortion; Acoustic signal detection; Acoustic waves; Electrostatics; Microscopy; Mirrors; Surface acoustic waves; Surface topography; Tunneling; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
  • Print_ISBN
    0-7695-2189-4
  • Type

    conf

  • DOI
    10.1109/ICMENS.2004.1509009
  • Filename
    1509009