Title :
Theoretical Calculation of TAM and Correction of Topography
Author :
Du, Sidan ; Cai, Lian ; Gao, Duntang
Author_Institution :
Nanjing University
Abstract :
A two-sphere system is applied to simulate the electrostatic force between the tip and the sample of tunneling acoustic microscopy (TAM). And theoretical calculation of this electrostatic force is presented. The cause of the distortion of topography obtained by feed back system is analyzed, and a method to correct this distortion is given. With this method, the correction results of two-dimensional and three-dimensional topography are shown, which are valuable and important to the research of metallic tip surface system.
Keywords :
Acoustic distortion; Acoustic signal detection; Acoustic waves; Electrostatics; Microscopy; Mirrors; Surface acoustic waves; Surface topography; Tunneling; Voltage;
Conference_Titel :
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN :
0-7695-2189-4
DOI :
10.1109/ICMENS.2004.1509009