DocumentCode
2016712
Title
Theoretical Calculation of TAM and Correction of Topography
Author
Du, Sidan ; Cai, Lian ; Gao, Duntang
Author_Institution
Nanjing University
fYear
2004
fDate
25-27 Aug. 2004
Firstpage
548
Lastpage
552
Abstract
A two-sphere system is applied to simulate the electrostatic force between the tip and the sample of tunneling acoustic microscopy (TAM). And theoretical calculation of this electrostatic force is presented. The cause of the distortion of topography obtained by feed back system is analyzed, and a method to correct this distortion is given. With this method, the correction results of two-dimensional and three-dimensional topography are shown, which are valuable and important to the research of metallic tip surface system.
Keywords
Acoustic distortion; Acoustic signal detection; Acoustic waves; Electrostatics; Microscopy; Mirrors; Surface acoustic waves; Surface topography; Tunneling; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN
0-7695-2189-4
Type
conf
DOI
10.1109/ICMENS.2004.1509009
Filename
1509009
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