• DocumentCode
    2016736
  • Title

    [Front matter]

  • fYear
    2007
  • fDate
    11-13 July 2007
  • Firstpage
    1
  • Lastpage
    12
  • Abstract
    The following topics are dealt with: advanced failure analysis; backend reliability; gate dielectrics; MEMS; device reliability.
  • Keywords
    dielectric materials; failure analysis; integrated circuit reliability; micromechanical devices; MEMS; advanced failure analysis; backend reliability; device reliability; gate dielectrics; integrated circuits failure;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 2007. IPFA 2007. 14th International Symposium on the
  • Conference_Location
    Bangalore
  • Print_ISBN
    978-1-4244-1014-9
  • Type

    conf

  • DOI
    10.1109/IPFA.2007.4378047
  • Filename
    4378047
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2016736