Title :
Groove depth uniformization in [110] Si anisotropic etching by ultrasonic wave and application to accelerometer fabrication
Author :
Ohwada, K. ; Negoro, Y. ; Konaka, Y. ; Oguchi, T.
fDate :
29 Jan-2 Feb 1995
Keywords :
Acceleration; Accelerometers; Anisotropic magnetoresistance; Capacitance; Electrodes; Etching; Fabrication; Frequency; Mechanical sensors; Silicon;
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
DOI :
10.1109/MEMSYS.1995.472546
