• DocumentCode
    2016855
  • Title

    High Q tunable cavity using dielectric less RF-MEMS varactors

  • Author

    Stefanini, Romain ; Chatras, Matthieu ; Pothier, Arnaud ; Orlianges, Jean-Christophe ; Blondy, Pierre

  • Author_Institution
    CNRS, Univ. de Limoges, Limoges, France
  • fYear
    2009
  • fDate
    Sept. 29 2009-Oct. 1 2009
  • Firstpage
    1444
  • Lastpage
    1447
  • Abstract
    This paper presents first experimental results on high Q MEMS tunable microwave cavity using RF-MEMS switched varactors. MEMS varactors that have been used in this work are based on a dielectric less tunable cantilever actuator, with good reliability and well-established fabrication process. It is shown that one can obtain large Q using type of component, with measured Qu between 550 and 850 for a tuning range of 500 MHz around 5 GHz.
  • Keywords
    cavity resonators; microfabrication; microswitches; microwave filters; varactors; RF-MEMS switched varactors; dielectric less RF-MEMS varactors; dielectric less tunable cantilever actuator; fabrication process; frequency 500 MHz; high Q tunable cavity; tunable filters; Capacitors; Dielectrics; Filters; Micromechanical devices; Q factor; Radiofrequency microelectromechanical systems; Resonance; Resonant frequency; Tuning; Varactors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2009. EuMC 2009. European
  • Conference_Location
    Rome
  • Print_ISBN
    978-1-4244-4748-0
  • Type

    conf

  • Filename
    5296111
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2016855