Characterization of platinum electrode using unbalanced magnetic field sputter for implantable biomedical applications

Summary form only given, as follows. Summary form only given. Platinum(Pt) is a biocompatible material which exhibits strong thermal and electrical conductivity due to its high melting point and good durability And thus it is used commonly in bio-electrodes and bio-chips. Tungsten (W) wire was coated with platinum film, and analyzed for their mechanical and biocompatibility properties. Platinum film has been deposited by magnetron sputter with unbalanced magnetic field system (UBM) experiment was performed under a variety of conditions by changing deposition temperature, bias voltage, magnetic field and deposition time in order to deduce the optimum process We examined exfoliation and sedimentation state of anode and cathode by microscope and EPMA under the test of electro-chemical corrosion using Hank´s solution and analyzed the film surface by AES survey and depth profile Film adhesion was analyzed by micro scratch tester Cross-section and diffraction was analyzed by SEM and XRD. Film showed very low impurity level, and surface and cross-section of the film is elaborate It also did not have sedimentation in film, and the crystallization in [110], [200], [220] and [222] was observed. However at high current density (800mA/cm/sup 2/) sedimentation was observed in corrosion test.