Title :
Nanopillar Formation via Defect Activation and Coulomb Explosion Initiated by a 355 nm Nd:YAG Laser Beam
Author :
Han, Yujie ; Furukawa, Yuji
Author_Institution :
Tokyo University of Agriculture and Technology
Abstract :
The interaction of nanosecond laser pulses in the ultraviolet wavelength range with the semiconductor SiC was investigated. Under low energy fluence, an array of highly orientated nanoparticles on the surface of SiC was formed via defect activation and coulomb explosion using 355 nm UV laser irradiation. Under high energy fluence, surface modification and ablation could occur.
Keywords :
Explosions; Laser ablation; Laser beams; Laser theory; Micromachining; Micromechanical devices; Optical pulses; Semiconductor laser arrays; Semiconductor lasers; Surface emitting lasers;
Conference_Titel :
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN :
0-7695-2189-4
DOI :
10.1109/ICMENS.2004.1509018
